Inventor
Dana Scranton
Inventor
Kalispell, MT, US
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1037%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests33%
B08BCleaning in general30%
PatentTitleYear
7,337,663'Sonic energy process chamber'20087,005,010'Multi-process system'20066,900,132'Single workpiece processing system'20056,875,284'Side-specific cleaning method and apparatus'20056,869,486'Methods for removing metallic contamination from wafer containers'20056,691,720'Multi-process system with pivoting process chamber'20046,681,499'Substrate drying method for use with a surface tension effect dryer with porous vessel walls'20046,668,844'Systems and methods for processing workpieces'20036,502,591'Surface tension effect dryer with porous vessel walls'20036,427,359'Systems and methods for processing workpieces'20026,395,101'Single semiconductor wafer processor'20026,374,837'Single semiconductor wafer processor'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2008Patents assigned to SEMITOOL INC (12)· patent assignee history
2002–2008Based in Kalispell, MT, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| SEMITOOL INC | 12 | 2002–2008 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kalispell, MT, US | 12 | 2002–2008 |