Inventor
Damon Vincent Williams
Inventor
Fremont, CA, US
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
B24Bprimary
B24BMachines, devices, or processes for grinding or polishing52%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1039%
B08BCleaning in general4%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests4%
PatentTitleYear
7,481,695'Polishing apparatus and methods having high processing workload for controlling polishing pressure applied by polishing head'20096,976,903'Apparatus for controlling retaining ring and wafer head tilt for chemical mechanical polishing'20056,937,915'Apparatus and methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control'20056,925,348'Methods for detecting transitions of wafer surface properties in chemical mechanical polishing for process status and control'20056,843,707'Methods for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing'20056,752,703'Chemical mechanical polishing apparatus and methods with porous vacuum chuck and perforated carrier film'20046,719,874'Active retaining ring support'20046,709,322'Apparatus for aligning a surface of an active retainer ring with a wafer surface for chemical mechanical polishing'20046,659,116'System for wafer carrier in-process clean and rinse'20036,652,357'Methods for controlling retaining ring and wafer head tilt for chemical mechanical polishing'20036,640,155'Chemical mechanical polishing apparatus and methods with central control of polishing pressure applied by polishing head'20036,443,815'Apparatus and methods for controlling pad conditioning head tilt for chemical mechanical polishing'2002Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2002–2009Patents assigned to LAM RES CORP (12)· patent assignee history
2002–2009Based in Fremont, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 12 | 2002–2009 |
Locations
| Location | Patents | Span |
|---|---|---|
| Fremont, California, US | 12 | 2002–2009 |