Inventor
Erwin Slot
Inventor
Zoetermeer, NL
Overview
Patents· 10 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps24%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices21%
B82YSpecific uses or applications of nanostructures17%
H01LSemiconductor devices10%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1010%
G05BControl or regulating systems in general3%
G06FElectric digital data processing3%
H05KPrinted circuits3%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h103%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests3%
PatentTitleYear
RE048046Lithography system, sensor and measuring method20209,934,943Beam grid layout20189,665,014'Charged particle lithography system with alignment sensor and beam measurement sensor'20179,575,418'Apparatus for transferring a substrate in a lithography system'20179,244,726'Network architecture for lithography machine cluster'20169,176,397'Apparatus for transferring a substrate in a lithography system'20158,936,994'Method of processing a substrate in a lithography system'20158,895,943'Lithography system and method of processing substrates in such a lithography system'2014RE045206'Lithography system, sensor and measuring method'20147,868,300'Lithography system, sensor and measuring method'2011Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2011–2018Patents assigned to MAPPER LITHOGRAPHY IP BV (9)· patent assignee history
2011–2020Based in Zoetermeer, NL· patent location history
2014–2016Patents assigned to KUIPER VINCENT SYLVESTER (4)· patent assignee history
2014–2016Patents assigned to SLOT ERWIN (4)· patent assignee history
2014–2015Patents assigned to DE BOER GUIDO (3)· patent assignee history
2014–2015Patents assigned to DE JONG HENDRIK JAN (3)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| MAPPER LITHOGRAPHY IP BV | 9 | 2011–2018 |
| KUIPER VINCENT SYLVESTER | 4 | 2014–2016 |
| SLOT ERWINself | 4 | 2014–2016 |
| DE BOER GUIDO | 3 | 2014–2015 |
| DE JONG HENDRIK JAN | 3 | 2014–2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Zoetermeer, NL | 10 | 2011–2020 |