Inventor
YURI PASKOVER
Inventor
IL
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices22%
G01BMeasuring length, thickness or similar linear dimensions19%
G01NInvestigating or analysing materials by determining their chemical or physical properties17%
G02BOptical elements, systems or apparatus9%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h109%
H04NPictorial communication, e.g. television7%
G06TImage data processing or generation, in general6%
B60RVehicles, vehicle fittings, or vehicle parts, not otherwise provided for2%
G01CMeasuring distances, levels or bearings2%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light2%
PatentTitleYear
12,487,190System and method for isolation of specific fourier pupil frequency in overlay metrology202512,422,363Scanning scatterometry overlay metrology202512,222,199Systems and methods for measurement of misregistration and amelioration thereof202512,001,148Enhancing performance of overlay metrology202411,874,539Perception camera with road surface glare reduction202411,852,590Systems and methods for metrology with layer-specific illumination spectra202311,841,621Moire scatterometry overlay202311,815,347Optical near-field metrology202311,592,755Enhancing performance of overlay metrology202311,409,205Non-orthogonal target and method for using the same in measuring misregistration of semiconductor devices202211,378,394On-the-fly scatterometry overlay metrology target202211,314,173Topographic phase control for overlay measurement202211,281,111Off-axis illumination overlay measurement using two-diffracted orders imaging2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to KLA CORP (9)· patent assignee history
2022–2023Patents assigned to KLA TENCOR CORP (4)· patent assignee history
2022–2025Based in IL· patent location history
2022–2025Based in US· patent location history
2023Patents assigned to KLA CORP CA (1)· patent assignee history
2024Patents assigned to GM GLOBAL TECH OPERATIONS LLC (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KLA CORP | 9 | 2022–2025 |
| KLA TENCOR CORP | 4 | 2022–2023 |
| GM GLOBAL TECH OPERATIONS LLC | 1 | 2024 |
| KLA CORP CA | 1 | 2023 |
Locations
| Location | Patents | Span |
|---|---|---|
| IL | 8 | 2022–2025 |
| US | 5 | 2022–2025 |