Inventor
Ekaterina MIKHAYLICHENKO
Inventor
US
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices32%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1032%
B08BCleaning in general18%
B24BMachines, devices, or processes for grinding or polishing18%
PatentTitleYear
12,525,468Integrated clean and dry module for cleaning a substrate202612,198,944Substrate handling in a modular polishing system with single substrate cleaning chambers202511,942,319Pad carrier for horizontal pre-clean module202411,819,976Spray system for slurry reduction during chemical mechanical polishing (cmp)202311,764,069Asymmetry correction via variable relative velocity of a wafer202311,721,563Non-contact clean module202311,289,347Non-contact clean module2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to APPLIED MATERIALS INC (7)· patent assignee history
2022–2026Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 7 | 2022–2026 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 7 | 2022–2026 |