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Inventor

Bo-Wei Chou

Inventor
Hsinchu, TW

Overview

4→
Patents
2017–2019
Patent span
Electricity
Primary field (CPC H)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary
H01LSemiconductor devices36%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1036%
C11DDetergent compositions18%
B08BCleaning in general9%
PatentTitleYear
10,283,384Method for etching etch layer and wafer etching apparatus201910,005,990Cleaning method for semiconductor device fabrication20189,881,816'Cleaning composition and method for semiconductor device fabrication'20189,687,885'Multi-cycle wafer cleaning method'2017

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2017–2019Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (4)· patent assignee history
2017–2019Based in Hsinchu, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG CO LTD42017–2019
Locations
LocationPatentsSpan
Hsinchu, TW42017–2019