Inventor
KAO-FENG LIAO
Inventor
TW
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices26%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
H10DInorganic electric semiconductor devices18%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1018%
B24BMachines, devices, or processes for grinding or polishing8%
C09GPolishing compositions8%
PatentTitleYear
12,359,090Composition and method for polishing and integrated circuit202512,327,734Chemical mechanical polish slurry and method of manufacture202512,297,375Slurry composition and method for polishing and integrated circuit202512,300,508Chemical mechanical polishing method202512,249,542Semiconductor device structure with an interconnect structure in a dielectric layer with multiple hydrophobic layers along sidewalls of the dielectric layer, and method for forming the same202512,172,263Chemical mechanical planarization tool202411,854,872Semiconductor device structure with interconnect structure and method for forming the same202311,679,469Chemical mechanical planarization tool202311,417,566Semiconductor device structure with interconnect structure and method for forming the same202211,373,879Chemical mechanical polishing method202211,189,727FinFET contacts and method forming same202111,145,751Semiconductor structure with doped contact plug and method for forming the same2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2025Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (12)· patent assignee history
2021–2025Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 12 | 2021–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 12 | 2021–2025 |