Inventor
Alexander Schafgans
Inventor
San Diego, CA, US
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H05Gprimary
H05GX-ray technique29%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices18%
H01SDevices using the process of light amplification by stimulated emission of radiation [laser] to amplify or generate light18%
G02BOptical elements, systems or apparatus14%
G02FOptical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein7%
Y02EReduction of greenhouse gas [ghg] emissions, related to energy generation, transmission or distribution7%
G01JMeasurement of intensity, velocity, spectral content, polarisation, phase or pulse characteristics of infrared, visible or ultraviolet light4%
G21KHandling of particles or ionising radiation not otherwise provided for4%
PatentTitleYear
10,663,866Wavelength-based optical filtering202010,645,789Optical isolation module202010,064,261Extreme ultraviolet light source20189,832,855Optical isolation module20179,516,729'Variable radius mirror dichroic beam splitter module for extreme ultraviolet source'20169,380,691'Adaptive laser system for an extreme ultraviolet light source'20169,357,625'Extreme ultraviolet light source'20169,209,595'Catalytic conversion of an optical amplifier gas medium'20158,872,122'Method of timing laser beam pulses to regulate extreme ultraviolet light dosing'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2020Patents assigned to ASML NETHERLANDS BV (9)· patent assignee history
2014Patents assigned to CYMER INC (1)· patent assignee history
2014–2020Based in San Diego, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASML NETHERLANDS BV | 9 | 2014–2020 |
| CYMER INC | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Diego, California, US | 9 | 2014–2020 |