Inventor
Shigeru Serikawa
Inventor
Chigasaki, JP
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G01Nprimary
G01NInvestigating or analysing materials by determining their chemical or physical properties38%
G01BMeasuring length, thickness or similar linear dimensions25%
G11BInformation storage based on relative movement between record carrier and transducer25%
H01LSemiconductor devices6%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h106%
PatentTitleYear
8,781,758'Optical inspection method and its apparatus'20148,638,430'Method for defect determination in fine concave-convex pattern and method for defect determination on patterned medium'20148,411,928'Scatterometry method and device for inspecting patterned medium'20138,253,935'Disk surface inspection apparatus, inspection system thereof, and inspection method thereof'20128,018,585'Surface defect inspecting apparatus with defect detection optical system and defect-detected image processing'20117,969,567'Method and device for detecting shape of surface of medium'20117,898,652'Method and apparatus for detecting defects on a disk surface'20117,612,888'Method and apparatus for measuring heterodyne optical interference utilizing adjustable polarizing plate'20096,295,131'Interference detecting system for use in interferometer'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001–2014Based in Chigasaki, JP· patent location history
2009–2014Patents assigned to HITACHI HIGH TECH CORP (8)· patent assignee history
2009Based in Nakai-machi, JP· patent location history
2012–2014Patents assigned to SERIKAWA SHIGERU (4)· patent assignee history
2012–2014Patents assigned to SASAZAWA HIDEAKI (3)· patent assignee history
2012–2013Patents assigned to YOSHIDA MINORU (2)· patent assignee history
2013–2014Patents assigned to HIROSE TAKENORI (2)· patent assignee history
2014Based in Kamisato, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| HITACHI HIGH TECH CORP | 8 | 2009–2014 |
| SERIKAWA SHIGERUself | 4 | 2012–2014 |
| SASAZAWA HIDEAKI | 3 | 2012–2014 |
| HIROSE TAKENORI | 2 | 2013–2014 |
| YOSHIDA MINORU | 2 | 2012–2013 |
Locations
| Location | Patents | Span |
|---|---|---|
| Chigasaki, JP | 7 | 2001–2014 |
| Kamisato, JP | 1 | 2014 |
| Nakai-machi, JP | 1 | 2009 |