Inventor
TRAN-HUI SHEN
Inventor
TW
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices57%
H01JElectric discharge tubes or discharge lamps21%
Y02PClimate change mitigation technologies in the production or processing of goods21%
PatentTitleYear
12,298,673Method of manufacturing photo masks202512,235,573EUV photomask and manufacturing method of the same202512,038,693Method of manufacturing photo masks202411,852,966Lithography mask with a black border regions and method of fabricating the same202311,782,338EUV photomask and manufacturing method of the same202311,687,006Method of manufacturing photo masks202311,327,405Method of manufacturing photo masks202211,307,489EUV photomask and manufacturing method of the same2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (8)· patent assignee history
2022–2025Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 8 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| TW | 8 | 2022–2025 |