Inventor
Eric R. Cobb
Inventor
Danvers, MA, US
Overview
Patents· 13 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps54%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
C23CCoating metallic material13%
H01LSemiconductor devices8%
Y10TTechnical subjects covered by former us classification4%
PatentTitleYear
10,262,833Temperature controlled ion source20199,859,098'Temperature controlled ion source'20189,093,372'Technique for processing a substrate'20159,064,795'Technique for processing a substrate'20158,466,431'Techniques for improving extracted ion beam quality using high-transparency electrodes'20138,263,944'Directional gas injection for an ion source cathode assembly'20127,887,034'Indirectly heated cathode clamp system and method'20117,888,662'Ion source cleaning method and apparatus'20117,655,932'Techniques for providing ion source feed materials'20107,491,947'Technique for improving performance and extending lifetime of indirectly heated cathode ion source'20097,476,877'Wafer charge monitoring'20097,102,139'Source arc chamber for ion implanter having repeller electrode mounted to external insulator'20066,984,831'Gas flow restricting cathode system for ion implanter and related method'2006Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2006–2015Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT (11)· patent assignee history
2006–2019Based in Danvers, MA, US· patent location history
2012–2013Patents assigned to CHANEY CRAIG R (2)· patent assignee history
2012–2013Patents assigned to COBB ERIC R (2)· patent assignee history
2012–2013Patents assigned to SINCLAIR FRANK (2)· patent assignee history
2018–2019Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VARIAN SEMICONDUCTOR EQUIPMENT | 11 | 2006–2015 |
| CHANEY CRAIG R | 2 | 2012–2013 |
| COBB ERIC Rself | 2 | 2012–2013 |
| SINCLAIR FRANK | 2 | 2012–2013 |
| VARIAN SEMICONDUCTOR EQUIPMENT ASS INC | 2 | 2018–2019 |
Locations
| Location | Patents | Span |
|---|---|---|
| Danvers, Massachusetts, US | 13 | 2006–2019 |