Inventor
AARON M. BURRY
Inventor
US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps86%
G01RMeasuring electric variables14%
PatentTitleYear
11,935,726High speed synchronization of plasma source/bias power delivery202411,715,624Adaptive pulse shaping with post match sensor202311,536,755System and method for arc detection using a bias RF generator signal202211,527,384Apparatus and tuning method for mitigating RF load impedance variations due to periodic disturbances202211,315,757Method and apparatus to enhance sheath formation, evolution and pulse to pulse stability in RF powered plasma applications202211,158,488High speed synchronization of plasma source/bias power delivery2021Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2021–2024Patents assigned to MKS INSTR INC (6)· patent assignee history
2021–2024Patents assigned to LAM RES CORP (2)· patent assignee history
2021–2024Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| MKS INSTR INC | 6 | 2021–2024 |
| LAM RES CORP | 2 | 2021–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 6 | 2021–2024 |