Inventor

Richard J. Hertel

Inventor

Boxford, MA, US

Overview

33→

Patents

1984–2020

Patent span

Electricity

Primary field (CPC H)

Patents· 33 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary

H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%

H01JElectric discharge tubes or discharge lamps22%

H01LSemiconductor devices8%

Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests6%

Y10TTechnical subjects covered by former us classification6%

H05HPlasma technique5%

C23CCoating metallic material4%

G11BInformation storage based on relative movement between record carrier and transducer4%

B60RVehicles, vehicle fittings, or vehicle parts, not otherwise provided for3%

C23FNon-mechanical removal of metallic material from surface3%

PatentTitleYear

10,600,616Apparatus and techniques to treat substrates using directional plasma and point of use chemistry2020 10,276,340Low particle capacitively coupled components for workpiece processing2019 10,224,181Radio frequency extraction system for charge neutralized ion beam2019 10,128,082Apparatus and techniques to treat substrates using directional plasma and point of use chemistry2018 10,062,548Gas injection system for ion beam device2018 10,004,133Apparatus and techniques to treat substrates using directional plasma and reactive gas2018 9,865,433'Gas injection system for ion beam device'2018 9,706,634'Apparatus and techniques to treat substrates using directional plasma and reactive gas'2017 9,589,769'Apparatus and method for efficient materials use during substrate processing'2017 9,520,264'Method and apparatus for clamping and cooling a substrate for ion implantation'2016 9,218,990'Method and apparatus for holding a plurality of substrates for processing'2015 9,070,730'Method and apparatus for removing a vertically-oriented substrate from a cassette'2015 8,941,082'Dual sided workpiece handling'2015 8,746,666'Media carrier'2014 8,585,115'Method and apparatus for lifting a horizontally-oriented substrate from a cassette'2013 8,563,407'Dual sided workpiece handling'2013 8,550,520'Method and apparatus for manipulating a substrate'2013 7,220,055'Air bearing having unitary housing'2007 5,751,246'Accountability and theft protection via the global positioning system'1998 5,532,690'Apparatus and method for monitoring and bounding the path of a ground vehicle'1996 5,453,782'Automatic exposure and gain control for low light level television camera'1995 5,350,427'Wafer retaining platen having peripheral clamp and wafer lifting means'1994 5,040,484'Apparatus for retaining wafers'1991 4,931,776'Fluid flow sensor with flexible vane'1990 4,899,059'Disk scanning apparatus for batch ion implanters'1990 4,836,733'Wafer transfer system'1989 4,817,556'Apparatus for retaining wafers'1989 4,744,709'Low deflection force sensitive pick'1988 4,634,331'Wafer transfer system'1987 4,602,713'Multiple wafer holder for a wafer transfer system'1986 4,527,846'Zoom focus and deflection assembly for electron discharge devices of the camera tube type'1985 4,498,833'Wafer orientation system'1985 4,449,885'Wafer transfer system'1984

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1984–1994Patents assigned to VARIAN ASSOCIATES (11)· patent assignee history

1984–1989Based in Bradford, MA, US· patent location history

1985–1998Based in Fort Wayne, IN, US· patent location history

1990–2020Based in Boxford, MA, US· patent location history

2007–2015Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT (8)· patent assignee history

2013–2016Patents assigned to HERTEL RICHARD J (6)· patent assignee history

2013–2016Patents assigned to FAIRHURST JOHN ROBERT (5)· patent assignee history

2016–2020Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (10)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees

Assignee	Patents	Span
VARIAN ASSOCIATES	11	1984–1994
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC	10	2016–2020
VARIAN SEMICONDUCTOR EQUIPMENT	8	2007–2015
HERTEL RICHARD Jself	6	2013–2016
FAIRHURST JOHN ROBERT	5	2013–2016

Locations

Location	Patents	Span
Boxford, Massachusetts, US	22	1990–2020
Bradford, Massachusetts, US	7	1984–1989
Fort Wayne, IN, US	4	1985–1998