Inventor
Christoph Hennerkes
Inventor
Huettlingen, DE
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices43%
G02BOptical elements, systems or apparatus24%
G21KHandling of particles or ionising radiation not otherwise provided for14%
B82YSpecific uses or applications of nanostructures5%
H01JElectric discharge tubes or discharge lamps5%
H05GX-ray technique5%
H05HPlasma technique5%
PatentTitleYear
10,394,128Method for predicting at least one illumination parameter for evaluating an illumination setting201910,078,267Method for predicting at least one illumination parameter for evaluating an illumination setting20189,955,563EUV light source for generating a usable output beam for a projection exposure apparatus20189,678,432'Optical assembly for increasing the etendue'20179,645,503'Collector'20179,551,941'Illumination system for an EUV lithography device and facet mirror therefor'20179,507,269'Illumination optical unit for projection lithography'20169,500,956'Optical system of a microlithographic projection exposure apparatus, and microlithographic exposure'20169,405,202'Optical system of a microlithographic projection exposure apparatus'2016Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2016–2019Patents assigned to ZEISS CARL SMT GMBH (9)· patent assignee history
2016–2018Based in Huettlingen, DE· patent location history
2016Based in Huettingen, DE· patent location history
2018–2019Based in Milpitas, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL SMT GMBH | 9 | 2016–2019 |
Locations
| Location | Patents | Span |
|---|---|---|
| Huettlingen, DE | 6 | 2016–2018 |
| Milpitas, California, US | 2 | 2018–2019 |
| Huettingen, DE | 1 | 2016 |