Inventor
STEVEN T. JENKINS
Inventor
US
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices42%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
B82YSpecific uses or applications of nanostructures17%
H01LSemiconductor devices8%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h108%
PatentTitleYear
12,242,187Magnification ramp scheme to mitigate template slippage202512,032,285Adaptive feedforward and feedback control for controlled viscosity alignment and field-to-field related friction variation202411,815,811Magnification ramp scheme to mitigate template slippage202311,604,408Adaptive feedforward and feedback control for controlled viscosity alignment and field-to-field related friction variation202311,422,460Alignment control in nanoimprint lithography using feedback and feedforward control2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to CANON KK (5)· patent assignee history
2022–2025Based in US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CANON KK | 5 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 5 | 2022–2025 |