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Inventor

Hsiao-Tzu Lu

Inventor
Hsinchu, TW

Overview

13→
Patents
2009–2017
Patent span
Physics
Primary field (CPC G)

Patents· 13 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices53%
G06FElectric digital data processing20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
H10DInorganic electric semiconductor devices7%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h107%
PatentTitleYear
9,852,251Manipulating parameterized cell devices in a custom layout design20178,969,922'Field effect transistors and method of forming the same'20158,893,069'Method of schematic driven layout creation'20148,815,496'Method for patterning a photosensitive layer'20148,707,226'Manipulating parameterized cell devices in a custom layout design'20148,394,576'Method for patterning a photosensitive layer'20138,236,579'Methods and systems for lithography alignment'20128,124,323'Method for patterning a photosensitive layer'20128,119,992'System for overlay measurement in semiconductor manufacturing'20127,723,014'System and method for photolithography in semiconductor manufacturing'20107,601,466'System and method for photolithography in semiconductor manufacturing'20097,582,538'Method of overlay measurement for alignment of patterns in semiconductor manufacturing'20097,479,466'Method of heating semiconductor wafer to improve wafer flatness'2009

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2009–2015Patents assigned to TAIWAN SEMICONDUCTOR MFG (10)· patent assignee history
2009–2017Based in Hsinchu, TW· patent location history
2012–2015Patents assigned to LU HSIAO-TZU (6)· patent assignee history
2012–2015Patents assigned to CHEN KUEI SHUN (4)· patent assignee history
2012–2013Patents assigned to CHANG VENCENT (2)· patent assignee history
2014–2017Patents assigned to SYNOPSYS INC (3)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG102009–2015
LU HSIAO-TZUself62012–2015
CHEN KUEI SHUN42012–2015
SYNOPSYS INC32014–2017
CHANG VENCENT22012–2013
Locations
LocationPatentsSpan
Hsinchu, TW132009–2017