Inventor
Kento Kurusu
Inventor
Kumamoto, JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
B08BCleaning in general14%
LOC1514%
A46BBrushes7%
LOC047%
PatentTitleYear
10,643,865Substrate cleaning apparatus202010,290,518Substrate liquid processing apparatus2019D0843118Cleaning brush20199,691,646'Substrate processing apparatus, substrate detection method of substrate processing apparatus and storage medium'20179,238,256'Substrate processing scrubber, substrate processing apparatus and substrate processing method'2016D0719591'Substrate cleaning tool'2014D0719199'Substrate cleaning tool'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2020Patents assigned to TOKYO ELECTRON LTD (7)· patent assignee history
2014–2019Based in Kumamoto, JP· patent location history
2016–2020Based in Koshi, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 7 | 2014–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| Kumamoto, JP | 4 | 2014–2019 |
| Koshi, JP | 3 | 2016–2020 |