Inventor
Michael Steigerwald
Inventor
Westhausen, DE
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps86%
B08BCleaning in general7%
G01BMeasuring length, thickness or similar linear dimensions7%
PatentTitleYear
8,816,303'Method of processing of an object'20148,304,750'Scanning charged particle beams'20128,283,641'Positioning device for a particle beam apparatus'20128,063,364'Particle optical device with magnet assembly'20117,910,887'Electron-beam device and detector system'20117,507,962'Electron-beam device and detector system'20097,425,701'Electron-beam device and detector system'20087,022,987'Particle-optical arrangements and particle-optical systems'20066,949,744'Electron microscopy system, electron microscopy method and focusing system for charged particles'20056,903,337'Examining system for the particle-optical imaging of an object, deflector for charged particles as well as method for the operation of the same'20056,855,938'Objective lens for an electron microscopy system and electron microscopy system'20056,828,565'Electron beam source, electron optical apparatus using such beam source and method of operating and electron beam source'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004–2012Patents assigned to ZEISS CARL NTS GMBH (10)· patent assignee history
2004–2006Based in Aalen, DE· patent location history
2008–2014Based in Westhausen, DE· patent location history
2011–2014Patents assigned to STEIGERWALD MICHAEL (4)· patent assignee history
2011–2014Patents assigned to DOENITZ DIETMAR (3)· patent assignee history
2011–2012Patents assigned to PREIKSZAS DIRK (2)· patent assignee history
2012Patents assigned to ACKERMANN JOERG (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ZEISS CARL NTS GMBH | 10 | 2004–2012 |
| STEIGERWALD MICHAELself | 4 | 2011–2014 |
| DOENITZ DIETMAR | 3 | 2011–2014 |
| PREIKSZAS DIRK | 2 | 2011–2012 |
| ACKERMANN JOERG | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Westhausen, DE | 7 | 2008–2014 |
| Aalen, DE | 5 | 2004–2006 |