Inventor
Elena Lawrence
Inventor
East Norriton, PA, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices30%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1030%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1015%
G01NInvestigating or analysing materials by determining their chemical or physical properties10%
G01BMeasuring length, thickness or similar linear dimensions5%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices5%
G06FElectric digital data processing5%
PatentTitleYear
11,069,583Apparatus and method for the minimization of undercut during a UBM etch process202111,004,755Apparatus and method for the minimization of undercut during a UBM etch process202110,553,502Two etch method for achieving a wafer thickness profile202010,026,660Method of etching the back of a wafer to expose TSVs20189,698,062'System and method for performing a wet etching process'20179,541,837'Apparatus and method for removing challenging polymer films and structures from semiconductor wafers'2017Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2017Patents assigned to VEECO PREC SURFACE PROC LLC (2)· patent assignee history
2017–2020Based in East Norriton, PA, US· patent location history
2018–2020Patents assigned to VEECO PRECISION SURFACE PROC LLC (2)· patent assignee history
2021Patents assigned to VEECO INSTR INC (2)· patent assignee history
2021Based in Media, PA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| VEECO INSTR INC | 2 | 2021 |
| VEECO PREC SURFACE PROC LLC | 2 | 2017 |
| VEECO PRECISION SURFACE PROC LLC | 2 | 2018–2020 |
Locations
| Location | Patents | Span |
|---|---|---|
| East Norriton, Pennsylvania, US | 4 | 2017–2020 |
| Media, Pennsylvania, US | 2 | 2021 |