Inventor
Wei-Chao Chiu
Inventor
Hsinchu, TW
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices26%
H10FInorganic semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation19%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1019%
H10DInorganic electric semiconductor devices15%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices11%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1011%
PatentTitleYear
10,734,436Method of using a surfactant-containing shrinkage material to prevent photoresist pattern collapse caused by capillary forces202010,546,889Method of high-aspect ratio pattern formation with submicron pixel pitch202010,186,542Patterning for substrate fabrication201910,121,811Method of high-aspect ratio pattern formation with submicron pixel pitch201810,090,357Method of using a surfactant-containing shrinkage material to prevent photoresist pattern collapse caused by capillary forces20189,627,262'Method of patterning features of a semiconductor device'20179,023,695'Method of patterning features of a semiconductor device'2015Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2015Patents assigned to TAIWAN SEMICONDUCTOR MFG (1)· patent assignee history
2015–2020Based in Hsinchu, TW· patent location history
2017–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (6)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TAIWAN SEMICONDUCTOR MFG CO LTD | 6 | 2017–2020 |
| TAIWAN SEMICONDUCTOR MFG | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hsinchu, TW | 7 | 2015–2020 |