LexDanaLexDanabeta
Inventor

Morohisa Tamura

Inventor
Susono, JP

Overview

1→
Patents
2001
Patent span
Chemistry
Primary field (CPC C)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material50%
H01JElectric discharge tubes or discharge lamps50%
PatentTitleYear
6,290,826'Composite sputtering cathode assembly and sputtering apparatus with such composite sputtering cathode assembly'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001Patents assigned to ULVAC CORP (1)· patent assignee history
2001Based in Susono, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ULVAC CORP12001
Locations
LocationPatentsSpan
Susono, JP12001