Inventor
Sergey Babin
Inventor
Castro Valley, CA, US
Overview
Patents· 8 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
B82YSpecific uses or applications of nanostructures24%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices14%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1010%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests10%
C23FNon-mechanical removal of metallic material from surface5%
G01KMeasuring temperature5%
PatentTitleYear
9,964,453Device and method for high precision fiber-optic temperature profile measurements in long length areas20187,786,403'Method for high-resolution processing of thin layers using electron beams'20106,720,565'Real-time prediction of and correction of proximity resist heating in raster scan particle beam lithography'20046,455,863'Apparatus and method for forming a charged particle beam of arbitrary shape'20026,420,717'Method and apparatus for real-time correction of resist heating in lithography'20026,373,071'Real-time prediction of proximity resist heating and correction of raster scan electron beam lithography'20026,326,635'Minimization of electron fogging in electron beam lithography'20015,847,959'Method and apparatus for run-time correction of proximity effects in pattern generation'1998Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1998–2001Patents assigned to ETEC SYSTEMS INC (2)· patent assignee history
1998–2010Based in Castro Valley, CA, US· patent location history
2002–2004Patents assigned to APPLIED MATERIALS INC (4)· patent assignee history
2010Patents assigned to NAWO TEC GMBH (1)· patent assignee history
2018Patents assigned to OPTROMIX COMPANY (1)· patent assignee history
2018Based in Novosibirsk, RU· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 4 | 2002–2004 |
| ETEC SYSTEMS INC | 2 | 1998–2001 |
| NAWO TEC GMBH | 1 | 2010 |
| OPTROMIX COMPANY | 1 | 2018 |
Locations
| Location | Patents | Span |
|---|---|---|
| Castro Valley, California, US | 7 | 1998–2010 |
| Novosibirsk, RU | 1 | 2018 |