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Inventor

Yasuo Kiyohara

Inventor
Kumamoto, JP

Overview

3→
Patents
2018–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Lprimary
H01LSemiconductor devices22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
B01DSeparation11%
B01FMixing, e.g. dissolving, emulsifying or dispersing11%
B08BCleaning in general11%
F26BDrying solid materials or objects by removing liquid therefrom11%
G05DSystems for controlling or regulating non-electric variables11%
PatentTitleYear
10,796,897Supercritical fluid producing apparatus and substrate processing apparatus202010,593,571Substrate processing apparatus202010,067,514Substrate processing apparatus and liquid mixing method2018

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2018–2020Patents assigned to TOKYO ELECTRON LTD (3)· patent assignee history
2018–2020Based in Kumamoto, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD32018–2020
Locations
LocationPatentsSpan
Kumamoto, JP32018–2020