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Inventor

Jeffrey C. Blahnik

Inventor
Leander, TX, US

Overview

18→
Patents
1994–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 18 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1039%
H01LSemiconductor devices32%
F27BFurnaces, kilns, ovens or retorts in general5%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices5%
H01JElectric discharge tubes or discharge lamps5%
B25JManipulators2%
B65HHandling thin or filamentary material, e.g. sheets, webs, cables2%
F28DHeat-exchange apparatus, not provided for in another subclass, in which the heat-exchange media do not come into direct contact2%
F28FDetails of heat-exchange and heat-transfer apparatus, of general application2%
G06FElectric digital data processing2%
PatentTitleYear
10,854,478Load lock fast pump vent202010,854,483High pressure steam anneal processing apparatus202010,831,112Reticle processing system202010,586,720Wafer processing systems including multi-position batch load lock apparatus with temperature control capability202010,541,157Load lock fast pump vent202010,256,125Wafer processing systems including multi-position batch load lock apparatus with temperature control capability201910,256,132Reticle processing system201910,186,449Apparatus and methods for wafer rotation to improve spatial ALD process uniformity20199,696,097'Multi-substrate thermal management apparatus'20179,484,183'Linkage conduit for vacuum chamber applications'20169,478,446'Load lock chamber'20169,378,994'Multi-position batch load lock apparatus and systems and methods including same'20169,214,369'Dynamic pitch substrate lift'20159,016,998'High throughput, low volume clamshell load lock'20158,662,812'Load lock fast pump vent'20148,497,486'Ion source having a shutter assembly'20138,272,825'Load lock fast pump vent'20125,294,069'Media feed and roller device for an electrographic printer'1994

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1994Based in Gilroy, CA, US· patent location history
2012–2020Patents assigned to BROOKS AUTOMATION INC (5)· patent assignee history
2012Patents assigned to BLAHNIK JEFFREY C (1)· patent assignee history
2012–2020Based in Pepperell, MA, US· patent location history
2013–2015Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT (3)· patent assignee history
2013–2020Based in Leander, TX, US· patent location history
2016–2020Patents assigned to APPLIED MATERIALS INC (7)· patent assignee history
2016–2020Patents assigned to VARIAN SEMICONDUCTOR EQUIPMENT ASS INC (3)· patent assignee history
2019–2020Based in Volente, TX, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
APPLIED MATERIALS INC72016–2020
BROOKS AUTOMATION INC52012–2020
VARIAN SEMICONDUCTOR EQUIPMENT32013–2015
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC32016–2020
BLAHNIK JEFFREY Cself12012
Locations
LocationPatentsSpan
Leander, Texas, US82013–2020
Pepperell, Massachusetts, US52012–2020
Volente, Texas, US42019–2020
Gilroy, California, US11994