Inventor
Dmitry A. Dzilno
Inventor
Sunnyvale, CA, US
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1018%
H01JElectric discharge tubes or discharge lamps15%
H01LSemiconductor devices10%
C23CCoating metallic material8%
G01BMeasuring length, thickness or similar linear dimensions8%
H01QAntennas, i.e. radio aerials8%
H03BGeneration of oscillations, directly or by frequency-changing, by circuits employing active elements which operate in a non-switching manner8%
C25DProcesses for the electrolytic or electrophoretic production of coatings5%
G01NInvestigating or analysing materials by determining their chemical or physical properties5%
G01RMeasuring electric variables5%
PatentTitleYear
11,114,282Phased array modular high-frequency source202111,081,318Geometrically selective deposition of dielectric films utilizing low frequency bias202110,854,428Spatial atomic layer deposition chamber with plasma pulsing to prevent charge damage202010,763,085Shaped electrodes for improved plasma exposure from vertical plasma source202010,720,311Phased array modular high-frequency source202010,504,699Phased array modular high-frequency source201910,312,120Position and temperature monitoring of ALD platen susceptor201910,234,261Fast and continuous eddy-current metrology of a conductive film20199,986,598Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methods20189,631,919'Non-contact sheet resistance measurement of barrier and/or seed layers prior to electroplating'20179,335,151'Film measurement'20168,880,210'Methods and apparatus for processing substrates using model-based control'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2021Patents assigned to APPLIED MATERIALS INC (12)· patent assignee history
2014Patents assigned to DZILNO DMITRY A (1)· patent assignee history
2014Patents assigned to GREGOR MARIUSCH (1)· patent assignee history
2014Patents assigned to LANE JOHN W (1)· patent assignee history
2014Patents assigned to LI HONGBIN (1)· patent assignee history
2014–2021Based in Sunnyvale, CA, US· patent location history
2019Based in Santa Clara, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 12 | 2014–2021 |
| DZILNO DMITRY Aself | 1 | 2014 |
| GREGOR MARIUSCH | 1 | 2014 |
| LANE JOHN W | 1 | 2014 |
| LI HONGBIN | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 11 | 2014–2021 |
| Santa Clara, California, US | 1 | 2019 |