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Inventor

Shuichi Yasuda

Inventor
Kyoto-shi, JP

Overview

2→
Patents
2021
Patent span
Performing operations
Primary field (CPC B)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

B08Bprimary
B08BCleaning in general20%
H01LSemiconductor devices20%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
B01DSeparation10%
B01FMixing, e.g. dissolving, emulsifying or dispersing10%
B05BSpraying apparatus10%
B05DProcesses for applying fluent materials to surfaces, in general10%
PatentTitleYear
11,101,147Substrate processing method and substrate processing apparatus202110,933,448Substrate treatment apparatus and substrate treatment method2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021Patents assigned to SCREEN HOLDINGS CO LTD (2)· patent assignee history
2021Based in Kyoto-shi, JP· patent location history
2021Based in Kyoto, JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
SCREEN HOLDINGS CO LTD22021
Locations
LocationPatentsSpan
Kyoto-shi, JP12021
Kyoto, JP12021