Inventor
Emanuel Beer
Inventor
San Jose, CA, US
Overview
Patents· 24 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1021%
C23CCoating metallic material12%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests12%
G01RMeasuring electric variables8%
G09GArrangements or circuits for control of indicating devices using static means to present variable information8%
H01JElectric discharge tubes or discharge lamps7%
G02FOptical devices or arrangements for the control of light by modification of the optical properties of the media of the elements involved therein5%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices5%
F16KValves4%
C30BSingle-crystal growth3%
PatentTitleYear
8,327,878'Chamber isolation valve RF grounding'20128,033,772'Transfer chamber for vacuum processing system'20117,919,972'Integrated substrate transfer module'20117,847,566'Configurable prober for TFT LCD array test'20107,499,767'Methods and apparatus for positioning a substrate relative to a support stage'20097,469,715'Chamber isolation valve RF grounding'20087,372,250'Methods and apparatus for determining a position of a substrate relative to a support stage'20087,355,418'Configurable prober for TFT LCD array test'20087,330,021'Integrated substrate transfer module'20087,319,335'Configurable prober for TFT LCD array testing'20087,208,047'Apparatus and method for thermally isolating a heat chamber'20077,151,981'Methods and apparatus for positioning a substrate relative to a support stage'20067,018,517'Transfer chamber for vacuum processing system'20067,007,919'Slit valve method and apparatus'20066,897,411'Heated substrate support'20056,847,730'Automated substrate processing system'20056,833,717'Electron beam test system with integrated substrate transfer module'20046,647,993'Surface-treated shower head for use in a substrate processing chamber'20036,554,907'Susceptor with internal support'20036,371,712'Support frame for substrates'20026,225,601'Heating a substrate support in a substrate handling chamber'20016,215,897'Automated substrate processing system'20016,182,603'Surface-treated shower head for use in a substrate processing chamber'20016,149,365'Support frame for substrates'2000Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2000–2003Patents assigned to APPLIED KOMATSU TECHNOLOGY INC (6)· patent assignee history
2000–2012Based in San Jose, CA, US· patent location history
2003–2012Patents assigned to APPLIED MATERIALS INC (18)· patent assignee history
2012Patents assigned to BEER EMANUEL (1)· patent assignee history
2012Patents assigned to KURITA SHINICHI (1)· patent assignee history
2012Patents assigned to LEE KE LING (1)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| APPLIED MATERIALS INC | 18 | 2003–2012 |
| APPLIED KOMATSU TECHNOLOGY INC | 6 | 2000–2003 |
| BEER EMANUELself | 1 | 2012 |
| KURITA SHINICHI | 1 | 2012 |
| LEE KE LING | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| San Jose, California, US | 24 | 2000–2012 |