Inventor
Shintaro Kaido
Inventor
Machida, JP
Overview
Patents· 1 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
8,901,016'Method of forming metal oxide hardmask'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014Patents assigned to ASM JAPAN (1)· patent assignee history
2014Patents assigned to FUKUDA HIDEAKI (1)· patent assignee history
2014Patents assigned to HA JEONGSEOK (1)· patent assignee history
2014Patents assigned to KAIDO SHINTARO (1)· patent assignee history
2014Based in Machida, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASM JAPAN | 1 | 2014 |
| FUKUDA HIDEAKI | 1 | 2014 |
| HA JEONGSEOK | 1 | 2014 |
| KAIDO SHINTAROself | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Machida, JP | 1 | 2014 |