LexDanaLexDanabeta
Inventor

Kenneth A. Monnig

Inventor
Palo Alto, CA, US

Overview

3→
Patents
1986–1990
Patent span
Chemistry
Primary field (CPC C)

Patents· 3 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material60%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1020%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests20%
PatentTitleYear
4,920,908'Method and apparatus for deposition of tungsten silicides'19904,696,833'Method for applying a uniform coating to integrated circuit wafers by means of chemical deposition'19874,565,157'Method and apparatus for deposition of tungsten silicides'1986

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

1986–1990Patents assigned to GENUS INC (2)· patent assignee history
1986–1990Based in Palo Alto, CA, US· patent location history
1987Patents assigned to HEWLETT PACKARD CO (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
GENUS INC21986–1990
HEWLETT PACKARD CO11987
Locations
LocationPatentsSpan
Palo Alto, California, US31986–1990