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Inventor

Yi-Lun Liu

Inventor
Miao-Li County, TW

Overview

1→
Patents
2021
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices100%
PatentTitleYear
11,022,898Apparatus for EUV lithography and method of measuring focus2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (1)· patent assignee history
2021Based in Miao-Li County, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG CO LTD12021
Locations
LocationPatentsSpan
Miao-Li County, TW12021