Inventor
Hidemoto HAYASHIHARA
Inventor
JP
Overview
Patents· 5 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G05Bprimary
G05BControl or regulating systems in general29%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1029%
Y02PClimate change mitigation technologies in the production or processing of goods29%
H01LSemiconductor devices12%
PatentTitleYear
11,996,337Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium202411,966,210Substrate processing apparatus, device management controller, and recording medium202411,782,425Substrate processing apparatus, method of monitoring abnormality of substrate processing apparatus, and recording medium202311,387,152Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium202211,237,538Substrate processing apparatus, device management controller, and recording medium2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2024Patents assigned to KOKUSAI ELECTRIC CORP (5)· patent assignee history
2022–2024Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| KOKUSAI ELECTRIC CORP | 5 | 2022–2024 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 5 | 2022–2024 |