Inventor
Shinichiro Shimomura
Inventor
Koshi, JP
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Lprimary
H01LSemiconductor devices27%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1027%
B08BCleaning in general13%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests13%
B05BSpraying apparatus7%
B05CApparatus for applying fluent materials to surfaces, in general7%
B65BMachines, apparatus or devices for, or methods of, packaging articles or materials7%
PatentTitleYear
9,922,849'Substrate liquid processing apparatus having nozzle with multiple flow paths and substrate liquid processing method thereof'20189,362,106'Substrate processing method, substrate processing apparatus, and storage medium'20169,278,768'Process liquid changing method and substrate processing apparatus'20169,027,573'Substrate processing apparatus for maintaining a more uniform temperature during substrate processing'20156,357,458'Cleaning apparatus and cleaning method'20026,241,827'Method for cleaning a workpiece'2001Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2001–2018Patents assigned to TOKYO ELECTRON LTD (6)· patent assignee history
2001–2002Based in Tosu, JP· patent location history
2015Patents assigned to HYAKUTAKE HIRONOBU (1)· patent assignee history
2015Patents assigned to SHIMOMURA SHINICHIRO (1)· patent assignee history
2015–2016Based in Koshi, JP· patent location history
2016Patents assigned to SONY CORP (1)· patent assignee history
2018Based in Kumamoto, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 6 | 2001–2018 |
| HYAKUTAKE HIRONOBU | 1 | 2015 |
| SHIMOMURA SHINICHIROself | 1 | 2015 |
| SONY CORP | 1 | 2016 |
Locations
| Location | Patents | Span |
|---|---|---|
| Koshi, JP | 3 | 2015–2016 |
| Tosu, JP | 2 | 2001–2002 |
| Kumamoto, JP | 1 | 2018 |