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Inventor

HIROKI TADATOMO

Inventor
JP

Overview

2→
Patents
2023–2026
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
B08BCleaning in general17%
H01LSemiconductor devices17%
PatentTitleYear
12,591,180Substrate processing apparatus and substrate processing method202611,848,189Substrate processing method, recording medium and substrate processing apparatus2023

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2023–2026Patents assigned to TOKYO ELECTRON LTD (2)· patent assignee history
2023–2026Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD22023–2026
Locations
LocationPatentsSpan
JP22023–2026