Inventor
Shinichi Egashira
Inventor
Utsunomiya, JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices47%
G01BMeasuring length, thickness or similar linear dimensions18%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1012%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
G06FElectric digital data processing6%
G06QInformation and communication technology [ict] specially adapted for administrative, commercial, financial, managerial or supervisory purposes6%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h106%
PatentTitleYear
11,067,908Measurement apparatus, exposure apparatus, and method of manufacturing article202110,831,116Pattern forming apparatus, deciding method, storage medium, information processing apparatus, and article manufacturing method202010,185,235Measurement apparatus, lithography apparatus, and method of manufacturing article201910,185,225Lithography apparatus and article manufacturing method201910,146,145Measurement apparatus, lithography apparatus, and method of manufacturing article20189,575,413'Exposure apparatus, exposure method, and device manufacturing method'20179,524,528'Management apparatus and management method'20168,518,614'Mark position detection apparatus'20138,107,051'Exposure apparatus with improved alignment mark position measurement condition setting feature, and device manufacturing method using the same'20127,921,238'USB host system and method for transferring transfer data'20117,764,357'Exposure apparatus and device manufacturing method'2010Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2010–2021Patents assigned to CANON KK (8)· patent assignee history
2010–2021Based in Utsunomiya, JP· patent location history
2011Patents assigned to PANASONIC CORP (1)· patent assignee history
2011Based in Osaka, JP· patent location history
2012–2013Patents assigned to EGASHIRA SHINICHI (2)· patent assignee history
2016Patents assigned to FUJITSU FSAS INC (1)· patent assignee history
2016Based in Kawasaki, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CANON KK | 8 | 2010–2021 |
| EGASHIRA SHINICHIself | 2 | 2012–2013 |
| FUJITSU FSAS INC | 1 | 2016 |
| PANASONIC CORP | 1 | 2011 |
Locations
| Location | Patents | Span |
|---|---|---|
| Utsunomiya, JP | 9 | 2010–2021 |
| Kawasaki, JP | 1 | 2016 |
| Osaka, JP | 1 | 2011 |