LexDanaLexDanabeta
Inventor

Michael A. Miller

Inventor
Sunnyvale, CA, US

Overview

7→
Patents
2003–2018
Patent span
Electricity
Primary field (CPC H)

Patents· 7 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H01Jprimary
H01JElectric discharge tubes or discharge lamps26%
C23CCoating metallic material22%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1022%
C30BSingle-crystal growth4%
H01LSemiconductor devices4%
PatentTitleYear
10,047,430Self-ionized and inductively-coupled plasma for sputtering and resputtering20188,696,875'Self-ionized and inductively-coupled plasma for sputtering and resputtering'20148,668,816'Self-ionized and inductively-coupled plasma for sputtering and resputtering'20147,674,360'Mechanism for varying the spacing between sputter magnetron and target'20107,294,574'Sputter deposition and etching of metallization seed layer for overhang and sidewall improvement'20076,852,202'Small epicyclic magnetron with controlled radial sputtering profile'20056,627,050'Method and apparatus for depositing a tantalum-containing layer on a substrate'2003

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2003–2018Patents assigned to APPLIED MATERIALS INC (7)· patent assignee history
2003–2010Based in Sunnyvale, CA, US· patent location history
2014Patents assigned to CHEN FUSEN (2)· patent assignee history
2014Patents assigned to DING PEIJUN (2)· patent assignee history
2014Patents assigned to FORSTER JOHN C (2)· patent assignee history
2014Patents assigned to FU JIANMING (2)· patent assignee history
2014–2018Based in Mountain View, CA, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
APPLIED MATERIALS INC72003–2018
CHEN FUSEN22014
DING PEIJUN22014
FORSTER JOHN C22014
FU JIANMING22014
Locations
LocationPatentsSpan
Sunnyvale, California, US42003–2010
Mountain View, California, US32014–2018