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Inventor

Yi Hsun Pan

Inventor
Tainan, TW

Overview

2→
Patents
2018–2020
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices40%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1040%
H01LSemiconductor devices20%
PatentTitleYear
10,747,105Cleaning module, cleaning apparatus and method of cleaning photomask20209,857,680'Cleaning module, cleaning apparatus and method of cleaning photomask'2018

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2018–2020Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (2)· patent assignee history
2018–2020Based in Tainan, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG CO LTD22018–2020
Locations
LocationPatentsSpan
Tainan, TW22018–2020