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Inventor

KOEN JOHAN FREDERIK LOONEN

Inventor
NL

Overview

1→
Patents
2023
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G02Bprimary
G02BOptical elements, systems or apparatus33%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H02NElectric machines not otherwise provided for33%
PatentTitleYear
11,789,373Object positioning system diagnostic and calibration methods positioning control method lithographic apparatus and device manufacturing method2023

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2023Patents assigned to ASML NETHERLANDS BV (1)· patent assignee history
2023Based in NL· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
ASML NETHERLANDS BV12023
Locations
LocationPatentsSpan
NL12023