Inventor
Hideki Yabe
Inventor
Hyogo, JP
Overview
Patents· 11 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices56%
C23CCoating metallic material13%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1013%
B81CProcesses or apparatus specially adapted for the manufacture or treatment of microstructural devices or systems6%
G01NInvestigating or analysing materials by determining their chemical or physical properties6%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests6%
PatentTitleYear
7,350,406'Sensor chip breaking strength inspection apparatus and sensor chip breaking strength inspection method'20086,898,267'X-ray mask'20056,265,113'Stress adjustment method of X-ray mask'20016,212,252'X-ray mask provided with an alignment mark and method of manufacturing the same'20016,110,291'Thin film forming apparatus using laser'20005,953,492'Method of manufacturing X-ray mask and heating apparatus'19995,905,005'X-ray mask and method of fabricating the same'19995,879,840'Film-forming method for X-ray mask'19995,834,142'Method of manufacturing X-ray mask and heating apparatus'19985,677,090'Method of making X-ray mask having reduced stress'19975,496,667'X-ray mask and its fabrication method'1996Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1996–2008Patents assigned to MITSUBISHI ELECTRIC CORP (11)· patent assignee history
1996–2005Based in Hyogo, JP· patent location history
1997–2008Based in Tokyo, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| MITSUBISHI ELECTRIC CORP | 11 | 1996–2008 |
Locations
| Location | Patents | Span |
|---|---|---|
| Hyogo, JP | 6 | 1996–2005 |
| Tokyo, JP | 5 | 1997–2008 |