Inventor
ATSUKI FUKAZAWA
Inventor
JP
Overview
Patents· 12 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material26%
H01LSemiconductor devices26%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1026%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1010%
H01JElectric discharge tubes or discharge lamps8%
H10DInorganic electric semiconductor devices5%
PatentTitleYear
12,525,449Method and apparatus for filling a gap202612,365,983Methods for forming a boron nitride film by a plasma enhanced atomic layer deposition process202512,230,497Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process202511,676,812Method for forming silicon nitride film selectively on top/bottom portions202311,646,197Method for depositing silicon-free carbon-containing film as gap-fill layer by pulse plasma-assisted deposition202311,637,011Method of topology-selective film formation of silicon oxide202311,626,316Method of depositing carbon-containing material on a surface of a substrate, structure formed using the method, and system for forming the structure202311,610,775Method and apparatus for filling a gap202311,610,774Methods for forming a topographically selective silicon oxide film by a cyclical plasma-enhanced deposition process202311,587,783Si precursors for deposition of SiN at low temperatures202311,453,943Method for forming carbon-containing silicon/metal oxide or nitride film by ALD using silicon precursor and hydrocarbon precursor202211,302,527Methods for forming doped silicon oxide thin films2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2026Patents assigned to ASM IP HOLDING BV (11)· patent assignee history
2022Patents assigned to ASM INT NV (1)· patent assignee history
2022–2026Based in JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| ASM IP HOLDING BV | 11 | 2022–2026 |
| ASM INT NV | 1 | 2022 |
Locations
| Location | Patents | Span |
|---|---|---|
| JP | 12 | 2022–2026 |