Inventor
Bunsuke Takeshita
Inventor
Utsunomiya, JP
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices57%
G03BApparatus or arrangements for taking photographs or for projecting or viewing them29%
G02BOptical elements, systems or apparatus14%
PatentTitleYear
10,545,413Evaluation method, exposure method, and method for manufacturing an article20209,766,548'Exposure apparatus, exposure method, and method of manufacturing article'20179,104,119'Exposure apparatus and device fabrication method for reducing a change in aberration due to driving error'20158,659,740'Drive error compensation for projection optics'2014Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2014–2020Patents assigned to CANON KK (4)· patent assignee history
2014Patents assigned to TAKESHITA BUNSUKE (1)· patent assignee history
2014–2020Based in Utsunomiya, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| CANON KK | 4 | 2014–2020 |
| TAKESHITA BUNSUKEself | 1 | 2014 |
Locations
| Location | Patents | Span |
|---|---|---|
| Utsunomiya, JP | 4 | 2014–2020 |