Inventor
CHEN-HUA HSU
Inventor
US
Overview
Patents· 4 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
C23Cprimary
C23CCoating metallic material24%
H01JElectric discharge tubes or discharge lamps24%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1024%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1024%
H01LSemiconductor devices6%
PatentTitleYear
12,227,837Ex situ coating of chamber components for semiconductor processing202512,163,219Ex situ coating of chamber components for semiconductor processing202411,761,079Oxidation resistant protective layer in chamber conditioning202311,365,479Ex situ coating of chamber components for semiconductor processing2022Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2022–2025Patents assigned to LAM RES CORP (4)· patent assignee history
2022–2025Based in US· patent location history
2023Based in TW· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 4 | 2022–2025 |
Locations
| Location | Patents | Span |
|---|---|---|
| US | 3 | 2022–2025 |
| TW | 1 | 2023 |