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Inventor

Yao-Chanet Chu

Inventor
Tainan, TW

Overview

1→
Patents
2000
Patent span
Physics
Primary field (CPC G)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
Y10STechnical subjects covered by former uspc cross-reference art collections [xracs] and digests33%
PatentTitleYear
6,064,475'Real time local defocus monitor system using maximum and mean angles of focus correction'2000

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2000Patents assigned to TAIWAN SEMICONDUCTOR MFG (1)· patent assignee history
2000Based in Tainan, TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG12000
Locations
LocationPatentsSpan
Tainan, TW12000