Inventor
Scott Wong
Inventor
Sunnyvale, CA, US
Overview
Patents· 6 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1055%
H01LSemiconductor devices45%
PatentTitleYear
10,566,216Equipment front end module gas recirculation202010,062,589Front opening ring pod201810,062,590Front opening ring pod20189,881,820'Front opening ring pod'20189,698,036'Stacked wafer cassette loading system'20178,185,242'Dynamic alignment of wafers using compensation values obtained through a series of wafer movements'2012Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2012–2020Patents assigned to LAM RES CORP (6)· patent assignee history
2012Patents assigned to BAILEY III ANDREW D (1)· patent assignee history
2012Patents assigned to CHEN JACK (1)· patent assignee history
2012Patents assigned to HUANG CHUNG HO (1)· patent assignee history
2012Patents assigned to LIN JEFFREY (1)· patent assignee history
2012–2018Based in Sunnyvale, CA, US· patent location history
2020Based in Mountain View, CA, US· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| LAM RES CORP | 6 | 2012–2020 |
| BAILEY III ANDREW D | 1 | 2012 |
| CHEN JACK | 1 | 2012 |
| HUANG CHUNG HO | 1 | 2012 |
| LIN JEFFREY | 1 | 2012 |
Locations
| Location | Patents | Span |
|---|---|---|
| Sunnyvale, California, US | 5 | 2012–2018 |
| Mountain View, California, US | 1 | 2020 |