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Inventor

YOSHINORI MORISADA

Inventor
JP

Overview

2→
Patents
2024
Patent span
Electricity
Primary field (CPC H)

Patents· 2 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

C23Cprimary
C23CCoating metallic material25%
H01LSemiconductor devices25%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1025%
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices13%
H01JElectric discharge tubes or discharge lamps13%
PatentTitleYear
12,060,635Hard mask, substrate processing method, and substrate processing apparatus202411,993,849Carbon hard mask, film forming apparatus, and film forming method2024

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2024Patents assigned to TOKYO ELECTRON LTD (2)· patent assignee history
2024Patents assigned to NATIONAL UNIV CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM (1)· patent assignee history
2024Based in JP· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TOKYO ELECTRON LTD22024
NATIONAL UNIV CORPORATION TOKAI NATIONAL HIGHER EDUCATION AND RESEARCH SYSTEM12024
Locations
LocationPatentsSpan
JP22024