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Inventor

Zhao Liu

Inventor
Beijing, CN

Overview

12→
Patents
2000–2020
Patent span
Physics
Primary field (CPC G)

Patents· 12 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices25%
G01BMeasuring length, thickness or similar linear dimensions17%
G01DMeasuring not specially adapted for a specific variable8%
B01DSeparation4%
B03CMagnetic or electrostatic separation of solid materials from solid materials or fluids4%
C07CAcyclic or carbocyclic compounds4%
C09GPolishing compositions4%
C09KMaterials for miscellaneous applications, not provided for elsewhere4%
C23FNon-mechanical removal of metallic material from surface4%
F16FSprings4%
PatentTitleYear
10,676,647Composition for tungsten CMP202010,143,963Mercury removal system for coal-fired power plant20189,904,183'Coarse motion and fine motion integrated reticle stage driven by planar motor'20189,903,704'Three-DOF heterodyne grating interferometer displacement measurement system'20189,869,857'Optical grating phase modulator for laser interference photoetching system'20189,791,789'Magnetically suspended coarse motion and fine motion integrated reticle stage driven by planar motor'20179,766,054'Planar motor rotor displacement measuring device and its measuring method'20179,752,643'Negative stiffness system for gravity compensation of micropositioner'20179,483,316'Managing a virtual machine instance'20169,182,217'Method for measuring displacement of large-range moving platform'20158,958,078'Two-dimensional, position-sensitive sensor-based system for positioning object having six degrees of freedom in space'20156,022,990'Method for synthesizing methyl acrylate'2000

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2000Based in Chengdu, CN· patent location history
2015–2018Patents assigned to UNIV TSINGHUA (8)· patent assignee history
2015–2018Based in Beijing, CN· patent location history
2017Patents assigned to SHANGHAI MICROELECTRONICS EQUI (2)· patent assignee history
2017Patents assigned to BEIJING U-PRECISION TECH CO LTD (1)· patent assignee history
2018Patents assigned to BEIJING U PREC TECH CO LTD (1)· patent assignee history
2020Patents assigned to CABOT MICROELECTRONICS CORP (1)· patent assignee history
2020Based in Naperville, IL, US· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
UNIV TSINGHUA82015–2018
SHANGHAI MICROELECTRONICS EQUI22017
BEIJING U PREC TECH CO LTD12018
BEIJING U-PRECISION TECH CO LTD12017
CABOT MICROELECTRONICS CORP12020
Locations
LocationPatentsSpan
Beijing, CN102015–2018
Naperville, Illinois, US12020
Chengdu, CN12000