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Inventor

TUNG-JUNG CHANG

Inventor
TW

Overview

4→
Patents
2021–2025
Patent span
Physics
Primary field (CPC G)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices43%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1043%
F16BDevices for fastening or securing constructional elements or machine parts together, e.g. nails, bolts, circlips, clamps, clips or wedges14%
PatentTitleYear
12,298,664Advanced load port for photolithography mask inspection tool202511,921,431Advanced load port for photolithography mask inspection tool202411,592,754Advanced load port for photolithography mask inspection tool202311,162,524Fittable and releasable fastener2021

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2021Patents assigned to FIVETECH TECHNOLOGY INC (1)· patent assignee history
2021–2025Based in TW· patent location history
2023–2025Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (3)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG CO LTD32023–2025
FIVETECH TECHNOLOGY INC12021
Locations
LocationPatentsSpan
TW42021–2025