LexDanaLexDanabeta
Inventor

CHIN-CHEN WANG

Inventor
TW

Overview

1→
Patents
2024
Patent span
Electricity
Primary field (CPC H)

Patents· 1 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices33%
H01LSemiconductor devices33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1033%
PatentTitleYear
11,966,170Lithographic overlay correction and lithographic process2024

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2024Patents assigned to TAIWAN SEMICONDUCTOR MFG CO LTD (1)· patent assignee history
2024Based in TW· patent location history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
TAIWAN SEMICONDUCTOR MFG CO LTD12024
Locations
LocationPatentsSpan
TW12024