Inventor
Takashi Dokan
Inventor
Miyagi, JP
Overview
Patents· 7 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
H01Jprimary
H01JElectric discharge tubes or discharge lamps33%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1022%
H01LSemiconductor devices17%
H03FAmplifiers6%
H05HPlasma technique6%
H10BElectronic memory devices6%
H10DInorganic electric semiconductor devices6%
H10NElectric solid-state devices not otherwise provided for6%
PatentTitleYear
11,087,960Radio frequency power source and plasma processing apparatus202111,017,985Plasma processing apparatus, impedance matching method, and plasma processing method202110,622,197Plasma processing apparatus and plasma processing method202010,553,407Plasma processing method and plasma processing apparatus20209,870,901'Method of producing processing condition of plasma processing apparatus, and plasma processing apparatus'20189,218,983'Etching method and device'20156,765,256'Semiconductor device'2004Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
2004Patents assigned to RENESAS TECH CORP (1)· patent assignee history
2004Based in Hyogo, JP· patent location history
2015–2021Patents assigned to TOKYO ELECTRON LTD (6)· patent assignee history
2015Patents assigned to DOKAN TAKASHI (1)· patent assignee history
2015Patents assigned to KAMATA HIKARU (1)· patent assignee history
2015Patents assigned to SASAKI MASARU (1)· patent assignee history
2015Based in Sendai, JP· patent location history
2018–2021Based in Miyagi, JP· patent location history
2021Based in Miyagi-gun, JP· patent location history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| TOKYO ELECTRON LTD | 6 | 2015–2021 |
| DOKAN TAKASHIself | 1 | 2015 |
| KAMATA HIKARU | 1 | 2015 |
| RENESAS TECH CORP | 1 | 2004 |
| SASAKI MASARU | 1 | 2015 |
Locations
| Location | Patents | Span |
|---|---|---|
| Miyagi, JP | 4 | 2018–2021 |
| Miyagi-gun, JP | 1 | 2021 |
| Sendai, JP | 1 | 2015 |
| Hyogo, JP | 1 | 2004 |