Inventor
Takeshi Suto
Inventor
Funabashi, JP
Overview
Patents· 9 as inventor
Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.
G03Fprimary
G03FPhotomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices29%
G01BMeasuring length, thickness or similar linear dimensions10%
H01LSemiconductor devices10%
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1010%
C08LCompositions of macromolecular compounds5%
C09JAdhesives5%
C09KMaterials for miscellaneous applications, not provided for elsewhere5%
C22CAlloys5%
C25BElectrolytic or electrophoretic processes for the production of compounds or non-metals5%
G01DMeasuring not specially adapted for a specific variable5%
PatentTitleYear
10,782,621Imprint method, imprint apparatus, and template202010,290,498Imprint apparatus and imprint method20199,500,961'Pattern formation method and exposure apparatus'20166,869,678'Removable pressure-sensitive adhesive and adhesive sheet of the same'20055,807,468'Anode electrolysis electrode material using precious metal-based amorphous alloy suitable for plastic processing and applicable to a bulk member'19984,931,830'Projection exposure apparatus'19904,748,333'Surface displacement sensor with opening angle control'19884,744,662'Apparatus for measuring dimensions of micropattern'19884,732,484'Apparatus for measuring the dimensions of a minute object'1988Career & activity timeline
Assembled from patent assignee/location history and declaration credentials.
1988Patents assigned to NIPPON KOGAKU KK (3)· patent assignee history
1988–1990Based in Funabashi, JP· patent location history
1990Patents assigned to NIKON CORP (1)· patent assignee history
1998Patents assigned to JAPAN SCIENCE & TECH CORP (1)· patent assignee history
1998Based in Mito, JP· patent location history
2005Patents assigned to NITTO DENKO CORP (1)· patent assignee history
2005Based in Ibaraki, JP· patent location history
2016–2020Based in Kanagawa, JP· patent location history
2019–2020Patents assigned to TOSHIBA MEMORY CORP (2)· patent assignee history
Inventor activity
Assignee and location history derived from the patent record.
Assignees
| Assignee | Patents | Span |
|---|---|---|
| NIPPON KOGAKU KK | 3 | 1988 |
| TOSHIBA MEMORY CORP | 2 | 2019–2020 |
| JAPAN SCIENCE & TECH CORP | 1 | 1998 |
| NIKON CORP | 1 | 1990 |
| NITTO DENKO CORP | 1 | 2005 |
Locations
| Location | Patents | Span |
|---|---|---|
| Funabashi, JP | 4 | 1988–1990 |
| Kanagawa, JP | 3 | 2016–2020 |
| Ibaraki, JP | 1 | 2005 |
| Mito, JP | 1 | 1998 |