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Inventor

Mary Anne Plano

Inventor
Mountain View, CA, US

Overview

4→
Patents
2001–2019
Patent span
Electricity
Primary field (CPC H)

Patents· 4 as inventor

Public. Assignee & technology derived from the patent record. Each patent links to its LexDana page.

H10Pprimary
H10PGeneric processes or apparatus for the manufacture or treatment of devices covered by class h1050%
H10WGeneric packages, interconnections, connectors or other constructional details of devices covered by class h1038%
C23CCoating metallic material13%
PatentTitleYear
10,400,323Ultra-low defect part process20197,157,798'Selective refractory metal and nitride capping'20076,844,258'Selective refractory metal and nitride capping'20056,265,320'Method of minimizing reactive ion etch damage of organic insulating layers in semiconductor fabrication'2001

Career & activity timeline

Assembled from patent assignee/location history and declaration credentials.

2001–2007Patents assigned to NOVELLUS SYSTEMS INC (3)· patent assignee history
2001–2019Based in Mountain View, CA, US· patent location history
2019Patents assigned to LAM RES CORP (1)· patent assignee history

Inventor activity

Assignee and location history derived from the patent record.

Assignees
AssigneePatentsSpan
NOVELLUS SYSTEMS INC32001–2007
LAM RES CORP12019
Locations
LocationPatentsSpan
Mountain View, California, US42001–2019